THIN FILM: PROCESSES & EQUIPMENT
INNOVATIVE SOLUTIONS FOR APPLICATIONS IN NANO TECHNOLOGY
New products & technologies require innovative solutions. DTF’s mission is to develop processes and equipment in the field of vacuum- and thin film technologies for various applications, e.g. in photovoltaics, micro- and optoelectronics and for special coatings for improved mechanical properties of tools.
Modular tools, designed as cluster-tools or inline-tools allow a high flexibility, especially in the R&D environment of industrial or academic research groups.
Tools can be easily expanded or modified to meet the requirements of future research topics.
Equipment control & software are tailor made solutions to guarantee optimized conditions for research and production applications.
The portfolio of DTF’s activities includes:
- process development for thin film deposition techniques (PVD, CVD, ALD,…)
- processes for surface modification & treatment (thermal processing, etching)
- ion implantation services (beamline implantation with energies in the keV – MeV range)
- PIII – treatment of 3D - substrates
DTF`S VISION IS TO CREATE AND TO OPTIMIZE SOLUTION
FOR OUR CUSTOMERS
The customer is integrated in the team, and together with our engineers and scientists all needs and features of the equipment are discussed and evaluated.
This gives the guarantee for transparent decisions and also for optimal equipment layout beginning from the very first steps of tool design. Throughout the entire process of construction and manufacturing of the equipment DTF is always in direct communication with the customer. Reliability and quality are key issues for DTF – to guarantee success and benefit for our customer and to meet the claim “Made in Germany” for our products.