ALD - ATOMIC LAYER DEPOSITION
A New Age of Controlled Deposition
by Ultrathin Multi-Layers
Datasheet No.1 / 2010-06
[ DOWNLOAD - PDF 289KB ]
ULTRA SHORT TIME ANNEALING
Micro- / Millisecond Annealing with
Flash Lamps or Laser Modules
Datasheet No.2 / 2010-06
[ DOWNLOAD - PDF 397KB ]
PLASMA BASED ION IMPLANTATION AND DEPOSITION
Tools for R&D and Small Scale Production
Datasheet No.3 / 2010-06
[ DOWNLOAD - PDF 377KB ]
EQUIPMENT FOR PLASMA BASED ION IMPLANTATION
Brochure with FZD Dresden-Rossendorf/ 2009-08
[ DOWNLOAD - PDF 1,52MB ]
