ALD - ATOMIC LAYER DEPOSITION

A NEW AGE OF CONTROLLED DEPOSITION OF ULTRATHIN MULTI-LAYER

: Cross-section of an ALD-process chamber

For the advanced processing of your substrates DTF offers tailor-made reactor-tools with high performance gas-inlet or DLI (Direct Liquid Injection) systems in combination with high speed gas-valves and highly adaptable software to develop your processes. DTF’s ALD coating-tools are designed for R&D-processes as well as for processes in an industrial scale.