Elevators for vacuum handling
Vacuum machinery & equipment for thin film deposition requires reliable and efficient substrate handling.

DTF offers a variety of handling tools, e.g. linear ele-vators for the handling of cassettes, substrate holders or modules. Based on our experience each handling system is adapted to costumers‘s requirements and optimized to the specific process condition.

Parameters

• transport mass: up to 15 kg
• z-travel: 350 mm
• control: PLC
• lifetime: 100.000 – 10 Mio. cycles (according to specification)
• adaptor flange: DN 200 (others upon request)
• leakage rate: <1 x 10^-8 mbar ∙ l ∙ s^-1